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Micro/Nanofabrication and MEMS

Track position

Deposition, lithography, etching, process integration, and MEMS design using process plans and simulation when cleanrooms are unavailable.

Suggested order

  1. Micro/Nano Processing Technology
  2. Design and Fabrication of Microelectromechanical Devices

Courses

Course Institution Role Tier Practice coverage
Micro/Nano Processing Technology MIT Mainline S Complete
Design and Fabrication of Microelectromechanical Devices MIT Mainline A Complete
Micro and Nanofabrication (MEMS) EPFL Alternative A Partial
Basic Overview of Semiconductor Device Processing and IC Fabrication IIT Kanpur / NPTEL Supplement A Partial

How to choose

  • For a first systematic pass, start with audit-passed mainline courses; read the limitation before using a record marked “Audit review,” and rarely take parallel alternatives.
  • Tiers measure public-resource completeness and self-study executability, not institutional or instructor prestige.
  • Use supplements only to close a specific topic, tool, or practice gap.

Track completion

  • Explain the core concepts, models, and methods of Micro/Nanofabrication and MEMS
  • Produce reproducible exercises, experiments, or designs with explicit checks